Detailed information

Product Name: Carbon Dioxide / Carbon Dioxide 
Molecular formula: CO₂ 
Purity: ≥99.9999% 
Product Description: Electronic-grade carbon dioxide is a core material in semiconductor manufacturing, with a purity of ≥99.999% (impurities at the ppb level). In its supercritical state, it combines gas permeability with liquid-like solvency, enabling highly efficient removal of nano-scale structural contaminants. Its chemical stability and high electronegativity make it ideal for processes such as chemical vapor deposition and ion implantation. Additionally, it is non-flammable, non-toxic, and fully recyclable, meeting the requirements of green manufacturing and significantly outperforming industrial-grade products.

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Electronic-grade carbon dioxide

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